BIMBERG CHINESE-GERMAN CENTER FOR GREEN PHOTONICS
 
“Quantum technologies will  enable more energy efficient photonic systems for a sustainable society”      
 
 

Advanced Device Processing

  • Wet oxidation system
  • Profilometer
  • Laser scanning microscope 
  • Modelling software
  • Electron beam evaporator
  • Mask Aligner
  • E-beam Writer
  • PECVD
  • ICP
  • Reactive Ion Etch (RIE)
  • E-beam evaporation system
  • Vacuum Coater
  • Wire Bonder
  • Plasma Cleaner 
  • Profs. Bimberg, Tian, Larisch at a lab tour with industry partner
  • Wet bench
  • Lithography
  • Wet oxidation system
  • Electron beam evaporator
  • Profilometer
  • Laser scanning microscope



 
 
 
 
 
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